Advanced Energy’s 10 kW power supply with Advanced Pulsing offers industry’s most precise, customizable plasma control

The
compact 10 kW Ascent SMS AP has the widest safe operating area (SOA) with peak voltages
up to 1200 V and frequencies from 0.5 to 150 kHz. Its four-block progressive
arc management system with a full voltage reversal is the industry’s most advanced
solution, providing the lowest arc energy with available self-adjusting arc
parameters that will dynamically move with the process. The AP waveform
delivers boost voltage, reverse voltage control and advanced pulse shaping that
enables fine-tuning to tailor film morphology and desired film properties.

“Advanced Energy continues to push the
performance of pulsed DC power supplies with unprecedented adaptability in
single-magnetron sputtering applications,” said Dhaval Dhayatkar, senior director
of marketing, plasma power products at Advanced Energy. “Packed with our most advanced technologies including a
highly configurable waveform, progressive arc management, best-in-class SOA, wide
frequency range and our PowerInsight process optimization software, the new 10
kW Ascent SMS AP power supply enables our customers to achieve the highest
possible levels of precision, repeatability and yield in advanced semiconductor
processes.”

The
new unit is the first AE power supply to embed PowerInsight process characterization
and optimization software. Simplifying the collection, analysis and translation
of data from critical power delivery systems, PowerInsight provides actionable
intelligence that can be applied to optimize processes for improved throughput
and yield, as well as reduce unplanned downtime of process equipment. With
PowerInsight, Advanced Energy’s pulsed DC power supplies minimize arcing while enhancing deposition
rate, film morphology and film properties.

For detailed product information and technical
specifications, visit www.advancedenergy.com/products/plasma-power-generators/pulse-dc-systems/ascent-ap-series.