{"id":17274,"date":"2021-09-01T08:55:00","date_gmt":"2021-09-01T08:55:00","guid":{"rendered":"https:\/\/eodishasamachar.com\/en\/2021\/09\/01\/partnership-between-suss-microtec-and-set-to-develop-a-combined-equipment-solution-for-3d-chip-integration\/"},"modified":"2021-09-01T08:55:00","modified_gmt":"2021-09-01T08:55:00","slug":"partnership-between-suss-microtec-and-set-to-develop-a-combined-equipment-solution-for-3d-chip-integration","status":"publish","type":"post","link":"https:\/\/eodishasamachar.com\/en\/2021\/09\/01\/partnership-between-suss-microtec-and-set-to-develop-a-combined-equipment-solution-for-3d-chip-integration\/","title":{"rendered":"Partnership between SUSS MicroTec and SET to develop a combined equipment solution for 3D chip integration"},"content":{"rendered":"<p> \n<\/p>\n<div id=\"\"><!--<a class=\"format-txt\" href=\"{baseURL}\/View\/{release.id}?_download=1\">View this article in .txt format<\/a>--><\/p>\n<p class=\"subheadline\">\n                               SUSS MicroTec SE and SET Corporation SA announce a partnership in sequential die-to-wafer (D2W) hybrid bonding, a die-based interconnect technology. As part of the partnership, SUSS MicroTec and SET will provide a fully automated, customizable, highest-yield equipment solution to customers. This solution will accelerate the industry&#8217;s path towards advanced 3D multi-die solutions such as stacked memory and chiplet integration.                            <\/p>\n<p>GARCHING, GERMANY AND SAINT-JEOIRE, FRANCE \u2013 EQS Newswire\u00a0&#8211; 1 September<b> <\/b>2021 &#8211; <a href=\"http:\/\/www.suss.com\">SUSS&#13;<br \/>\nMicroTec<\/a>, a leading supplier of equipment and process solutions for the&#13;<br \/>\nsemiconductor industry announces a joint development agreement (JDA) with SET,&#13;<br \/>\na leading supplier of high precision flip-chip bonders. The main focus of the&#13;<br \/>\nJDA is the development of a fully automated, customizable, highest-yield&#13;<br \/>\nsequential die-to-wafer hybrid bonding equipment solution by combining SUSS&#13;<br \/>\nMicroTec&#8217;s expertise with FEOL-compatible automated surface preparation of&#13;<br \/>\nwafers and singulated dies which are populated on a wafer or frame and SET&#8217;s&#13;<br \/>\nultra-high accuracy die-placement technology, which will be further enhanced by&#13;<br \/>\nhigh-performance metrology that offers closed-loop feedback to the bonding&#13;<br \/>\nsystem.<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>At a time where traditional transistor-scaling is approaching its limit, 3D&#13;<br \/>\npackaging and heterogeneous integration have already been widely adopted in the&#13;<br \/>\nindustry in order to further increase the performance and functionality of&#13;<br \/>\ntoday&#8217;s semiconductor devices. However, today&#8217;s 2.5D and 3D packaging schemes&#13;<br \/>\nare limited by the minimum interconnect density that traditional microbump&#13;<br \/>\ntechnology can offer. Hybrid bonding solves this problem by bonding the direct&#13;<br \/>\ncontact between two metal pads (mostly copper) and surrounding dielectrics in&#13;<br \/>\none single bonding step. This bumpless bonding approach allows for&#13;<br \/>\nsubstantially smaller pitches and higher interconnect density which are the key&#13;<br \/>\nenablers for future generations of multi-die solutions.<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>Interconnect density scaling is driven by a number of fast-growing&#13;<br \/>\napplications that include power computing, artificial intelligence (e.g.&#13;<br \/>\nautonomous driving), 5G mobile, as well as a variety of additional&#13;<br \/>\nMore-than-Moore devices such as next-generation CMOS image sensors. To obtain&#13;<br \/>\nhigh yields for devices with high interconnect densities customers not only&#13;<br \/>\nrequire ultra-precise die-placement solutions, but also reliable surface&#13;<br \/>\nactivation and a process guaranteeing particle-free surfaces.<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>As part of this partnership, SUSS MicroTec&#8217;s high-efficiency surface&#13;<br \/>\npreparation modules and throughput-optimized metrology solutions for post bond&#13;<br \/>\noverlay verification will be combined with SET&#8217;s latest ultra-high accuracy D2W&#13;<br \/>\nhybrid bonding platform. Closed-loop feedback between the metrology and the&#13;<br \/>\ndie-bonder module will help to continuously monitor and optimize the overlay&#13;<br \/>\nperformance, enabling consistent die-placement accuracy below 200 nm as well as&#13;<br \/>\ninterconnect pitch scales in the sub-micron region. The modular, highly&#13;<br \/>\nflexible equipment concept allows for stand-alone surface preparation and&#13;<br \/>\nhybrid bonding as well as a fully integrated equipment solution depending on&#13;<br \/>\nthe specific application and\/or customer requirements. This concept also&#13;<br \/>\nenables an integrated cluster approach that can support all individual hybrid&#13;<br \/>\nbonding paths in a single platform: wafer-to-wafer (W2W), collective&#13;<br \/>\ndie-to-wafer (CoD2W) and\/or sequential die-to-wafer (D2W).<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>Goetz M. Bendele, PhD, CEO of SUSS MicroTec, puts this into perspective:&#13;<br \/>\n&#8220;Hybrid bonding is one of the main growth drivers of the advanced&#13;<br \/>\nsemiconductor backend equipment space, as well as one of the main growth levers&#13;<br \/>\nfor SUSS MicroTec. With our partnership with SET, we will be able to offer our&#13;<br \/>\ncustomers a complete suite of both die-to-wafer and wafer-to-wafer hybrid&#13;<br \/>\nbonding solutions for the broadest set of heterogeneous integration&#13;<br \/>\napplications in the advanced backend space. Our die-to-wafer bonding solution,&#13;<br \/>\nleveraging the combination of SET&#8217;s leading-precision die placement technology&#13;<br \/>\nwith SUSS&#8217;s proven surface activation, automation, and metrology capabilities,&#13;<br \/>\nwill deliver additional customer value through differentiation in terms of&#13;<br \/>\nthroughput and yield, while at the same time enabling friction-less integration&#13;<br \/>\ninto our customers&#8217; fabrication sites.&#8221;<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>Pascal Metzger, PhD, CEO of SET: &#8220;Thanks to several partnerships we had&#13;<br \/>\n&amp; our more than 10 years experience in hybrid bonding, we have succeeded in&#13;<br \/>\ntaking hybrid bonding from a purely laboratory state to an industrial state.&#13;<br \/>\nThus in September 2019, SET launched a stand-alone machine &#8211; the NEO HB. Thanks&#13;<br \/>\nto our new partnership with SUSS MicroTec, we are now going to accelerate the&#13;<br \/>\nintegration and automation phase of the process. This will permit to provide a&#13;<br \/>\ncomplete industrial solution to our customers, for applications coming in the&#13;<br \/>\nvery near future such as HPC, IA, 5G and many other more, to diversify our&#13;<br \/>\noffer and address new market segments.&#8221;<\/p>\n<p>&#13;<br \/>\n&#13; <\/p>\n<p>For more details on Hybrid Bonding at SUSS MicroTec please visit our&#13;<br \/>\nwebsite: <a href=\"https:\/\/www.suss.com\/hybrid-bonding\" target=\"_blank\" rel=\"noopener noreferrer\">https:\/\/www.suss.com\/hybrid-bonding<\/a><\/p>\n<p>Additional features:<br \/>&#13;<br \/>\nPicture: <a href=\"https:\/\/eqs-cockpit.com\/c\/fncls.ssp?u=2e22977094a46bde1e85a5237025d59d\">https:\/\/eqs-cockpit.com\/c\/fncls.ssp?u=2e22977094a46bde1e85a5237025d59d<\/a><\/p>\n<\/p><\/div>\n\n<br \/><a href=\"https:\/\/www.media-outreach.com\/news\/2021-09-01\/92827\/partnership-between-suss-microtec-and-set-to-develop-a-combined-equipment-solution-for-3d-chip-integration\">Source link <\/a><\/p>\n","protected":false},"excerpt":{"rendered":"<p>SUSS MicroTec SE and SET Corporation SA announce a partnership in sequential die-to-wafer (D2W) hybrid bonding, a die-based interconnect technology. As part of the partnership, SUSS MicroTec and SET will provide a fully automated, customizable, highest-yield equipment solution to customers. This solution will accelerate the industry&#8217;s path towards advanced 3D multi-die solutions such as stacked &hellip;<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":[],"categories":[60],"tags":[],"_links":{"self":[{"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/posts\/17274"}],"collection":[{"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/comments?post=17274"}],"version-history":[{"count":0,"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/posts\/17274\/revisions"}],"wp:attachment":[{"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/media?parent=17274"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/categories?post=17274"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/eodishasamachar.com\/en\/wp-json\/wp\/v2\/tags?post=17274"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}